Description
CKD FSM3-L — Compact Flow Sensor Rapiflow, genuine CKD product.
Overview
The CKD Rapiflow FSM3 is a compact thermal-type flow sensor for measuring the flow of compressed air and gases. It detects flow from heat transfer across a sensing chip and provides a display and switch or analog output. It is used for leak checks, vacuum confirmation, purge gas monitoring and air consumption management on production equipment.
Key Features
- Thermal sensing principle with no moving parts
- Digital display with switching or analog output
- Compact body for direct line mounting
- Models for different flow ranges and gases
Specifications
| Part No. |
Display Accuracy |
Flow Range (L/min) |
Responsiveness |
Accuracy (%) |
Port Size |
Material/Finish |
Applicable Fluid |
Accuracy |
Mass (g) |
Repeatability |
| FSM3-L102U1CA1B1N-BJ |
Within ±5%FS |
1000 |
50ms or less |
(Analog output) within ± 3 |
Rc1/2 |
Body: resin |
N2, argon, carbon dioxide, mixed gas |
|
120 |
|
| FSM3-L200U1CH1B1N-BH |
Within ±5%FS |
20 |
50ms or less |
(Analog output) within ± 3 |
One-touch Φ6 |
Body: resin, packing: fluororubber |
Air, N2, argon, carbon dioxide, mixed gas (argon + carbon dioxide) |
Within ±5%FS |
50 |
Within ±1%FS |
| FSM3-L200U1CH1B1T-BH |
Within ±5%FS |
20 |
50ms or less |
(Analog output) within ± 3 |
One-touch Φ6 |
Body: resin |
N2, argon, carbon dioxide, mixed gas |
|
90 |
|
| FSM3-L201U1DH1B1N-BH |
Within ±5%FS |
200 |
50ms or less |
(Analog output) within ± 3 |
One-touch Φ8 |
Body: resin |
N2, argon, carbon dioxide, mixed gas |
|
80 |
|
| FSM3-L201U1DH1B1T-BH |
Within ±5%FS |
200 |
50ms or less |
(Analog output) within ± 3 |
One-touch Φ8 |
Body: resin |
N2, argon, carbon dioxide, mixed gas |
|
120 |
|
How to Order
Choose the flow range, gas type, port size and output type required by the controller. Please confirm the full part number and options against the CKD catalog; contact us if you need help identifying the right model.
Product image is representative of the CKD series; appearance varies by size and model.
About CKD
CKD Corporation is a Japanese manufacturer of pneumatic and fluid control components, including solenoid valves, process valves, air cylinders, air preparation units (FRL), fittings and flow control devices.
Ordering & Shipping
- Genuine CKD product sourced through Korean distribution
- Ships worldwide from South Korea by FedEx International Priority Express
- Lead time varies by model; please inquire for exact delivery
- Import duties and taxes are payable by the recipient
- Bulk and trade pricing available on request
